Paper Title:
Defect Formation in MBE Er-Doped Si Light-Emitting Structures
  Abstract

Structural defects in Si:Er layers grown by molecular beam epitaxy have been studied by transmission electron microscopy. Two kinds of second phase precipitates are the main defects in the layers with Er concentration ≥ 2х1019 cm-3: ball-shaped precipitates (4-25 nm) of metallic Er localized at the layer-substrate interface and platelet precipitates of ErSi2 extending through the whole layer. We studied the effect of Er concentration (8х1018 - 4х1019 cm-3) and growth temperature (400 - 700°C) on the defect generation. The peculiarities of defect generation in MBE Si:Er layers implanted with B+ ions were also studied.

  Info
Periodical
Solid State Phenomena (Volumes 108-109)
Edited by
B. Pichaud, A. Claverie, D. Alquier, H. Richter and M. Kittler
Pages
779-786
DOI
10.4028/www.scientific.net/SSP.108-109.779
Citation
V.I. Vdovin, N.A. Sobolev, D.V. Denisov, E. I. Shek, "Defect Formation in MBE Er-Doped Si Light-Emitting Structures ", Solid State Phenomena, Vols. 108-109, pp. 779-786, 2005
Online since
December 2005
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$32.00
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