Gettering and Defect Engineering in Semiconductor Technology XI
Solid State Phenomena Volumes 108 - 109
doi:10.4028/www.scientific.net/SSP.108-109
-
p279
Impact of Hydrogenation on Electrical Properties of NiSi2 Precipitates in Silicon
[
257 K
]
Authors: O.F. Vyvenko, N.V. Bazlov, M.V. Trushin, A.A. Nadolinski, Michael Seibt, Wolfgang Schröter, George T. Hahn
-
p285
On the Electrical Activity of Misfit and Threading Dislocations in p-n Junctions Fabricated in Thin Strain-Relaxed Buffer Layers
[
522 K
]
Authors: Eddy Simoen, G. Eneman, Sheron Shamuilia, V. Simons, Eugenijus Gaubas, R. Delhougne, R. Loo, K. De Meyer, C. Claeys
-
p291
Novel Low-K Dielectric Obtained by Xenon Implantation in SiO2
[
3 M
]
Authors: H. Assaf, E. Ntsoenzok, M.O. Ruault, O. Kaïtasov
-
p297
Influence of Metal Contamination in the Measurement of p-Type Cz Silicon Wafer Lifetime and Impact on the Oxide Growth
[
24 M
]
Authors: Carole Bigot, Adrien Danel, S. Thevenin
-
p303
Structure Determination of Clusters Formed in Ultra-Low Energy High-Dose Implanted Silicon
[
1 M
]
Authors: N. Cherkashin, Martin J. Hÿtch, Fuccio Cristiano, A. Claverie
-
p309
Impact of Hydrogen Implantation on Helium Implantation Induced Defects
[
1 M
]
Authors: G. Gaudin, Frédéric Cayrel, Corrado Bongiorno, Robert Jérisian, Vito Raineri, Daniel Alquier
-
p315
Bulk Radiation Damage Induced in Thin Epitaxial Silicon Detectors by 24 GeV Protons
[
155 K
]
Authors: V. Khomenkov, D. Bisello, M. Boscardin, Mara Bruzzi, A. Candelori, G.-F. Dalla Betta, A.P. Litovchenko, C. Piemonte, R. Rando, F. Ravotti, N. Zorzi
-
p321
Defect Engineering in Ion Beam Synthesis of SiC and SiO2 in Si
[
861 K
]
Authors: Reinhard Kögler, A. Mücklich, J.R. Kaschny, H. Reuther, F. Eichhorn, H. Hutter, Wolfgang Skorupa
-
p327
Electrical Passivation of Silicon Wafers
[
544 K
]
Authors: M. Kunst, Frank Wünsch, O. Abdallah, G. Citarella
-
p333
Point Defects Interaction with Extended Defects and Impurities and Its Influence on the Si-SiO2 System Properties
[
220 K
]
Authors: Daniel Kropman, U. Abru, Tiit Kärner, U. Ugaste, E. Mellikov, M. Kauk, Ivo Heinmaa, A. Samoson, Arthur Medvid
-
p339
Magnetic-Field-Induced Modification of Properties of Silicon Lattice Defects
[
142 K
]
Authors: V.A. Makara, L.P. Steblenko, Yu.L. Kolchenko, S.M. Naumenko, O.A. Patran, V.M. Kravchenko, O.S. Dranenko
-
p345
Phase Transition on Surface of IV Group Semiconductors by Laser Radiation
[
24 M
]
Authors: Arthur Medvid, Pavels Onufrijevs, Dainis Grabovskis, Aleksandrs Mychko, Valentinas Snitka, Petr M. Lytvyn, Valentina Plaushinaitiene
-
p351
Stress - Dependent Out - Annealing of Defects in Self - Implanted Silicon
[
605 K
]
Authors: Andrzej Misiuk, Barbara Surma, Jadwiga Bak-Misiuk
-
p357
A New Approach to Study the Damage Induced by Inert Gases Implantation in Silicon
[
598 K
]
Authors: S. Peripolli, Marie France Beaufort, David Babonneau, Sophie Rousselet, P.F.P. Fichtner, L. Amaral, Erwan Oliviero, Jean François Barbot, S.E. Donnelly
-
p365
First Principles Calculation for Point Defect Behavior, Oxygen Precipitation and Cu Gettering in Czochralski Silicon
[
1 M
]
Authors: Koji Sueoka, S. Shiba, S. Fukutani