Paper Title:
Investigation of Electrostatic Cantilever-Type Micromechanical Actuator
  Abstract

Electrostatic microswitch and its fabrication technology have been developed for the first time in Lithuania, at Kaunas University of Technology (KTU). The microdevices were produced by using a nickel surface micromachining process. The microswitch consists of a cantilevered nickel structure suspended over the bottom electrodes. The width of the structure is 30 μm, thickness - 2 μm and length ranges from 67 to 150 μm. Implementation of microswitches as a substitute for the present solid-state switching devices poses many problems. In particular higher actuation voltages, lower switching speed and a reduced lifetime are considered to be among the most significant ones. With the aim of improving these parameters a finite element model is currently developed that takes into account not only microscale-specific electrostatic actuation and air damping effects but also includes the bouncing phenomena. Experimental studies of electrical and dynamic characteristics were also carried out with the purpose of model validation and correction. The paper presents initial results of theoretical modal and air damping analysis as well it shows the first attempts to measure vibration modes of the cantilever structure of the microswitch using Laser Doppler vibrometer.

  Info
Periodical
Solid State Phenomena (Volume 113)
Edited by
Nin Bizys, Andrejus Henrikas Marcinkevicius
Pages
179-184
DOI
10.4028/www.scientific.net/SSP.113.179
Citation
R. Dauksevicius, V. Ostaševičius, S. Tamulevičius, A. Bubulis, R. Gaidys, "Investigation of Electrostatic Cantilever-Type Micromechanical Actuator", Solid State Phenomena, Vol. 113, pp. 179-184, 2006
Online since
June 2006
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: J.S. Bhatti, R.A. Pasha
Abstract:Vibration control using combination of piezoelectric material and electrical circuits can remove the vibration energy from the host...
431
Authors: Abhay M. Khalatkar, Rakesh H. Haldkar, V.K. Gupta
Chapter 22: Metrology and Measurement
Abstract:There is increasing demand for developing smart structures in various electronic and electromechanical systems during past two decades. The...
4212
Authors: Meng Hua Xu, Bao Lin Wang
Chapter 5: Metal Alloy Materials
Abstract:This paper considers the vibtation problem of beam piezoelectric transducer. Traditional reasearches face difficulties in providing the...
1114
Authors: Takahiro Kawashima, Atsushi Matsui, Kazuo Muto, Moeto Nagai, Takayuki Shibata
Chapter 5: MEMS/NEMS
Abstract:In order to detect acoustic emission (AE) signals which are transient elastic waves generated by rapid release of strain energy derived from...
575
Authors: Kai Zhang, De Shi Wang, Qi Zheng Zhou
Chapter 2: Applied Mechanics and Mechanical Engineering
Abstract:In order to accurately predict the electromechanical coupling performance of bimorph piezoelectric cantilever structure. Based on...
447