Analysis of a Microelectrostatic Motor

An electrostatic motor is a very complex dynamical system whose performance critically depends on the shape of the rotor and stator, number of poles, clearances between axis and rotor, friction, rotor vibrations, and levitation, etc. There are many possible micromotor constructions depending on the required accuracy, the speed of rotation and power of the motor. This work shows the technology required to build a micromotor using UV lithography. Studies of vibration characteristics using ANSYS and MATLAB modeling software and an experimental analysis to optimize the dynamical properties of the system and to improve its manufacturing process are also shown.