Technological Trends of Nanoelectromechanical Systems |
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| Journal | Solid State Phenomena (Volume 113) |
|---|---|
| Volume | Mechatronic Systems and Materials |
| Edited by | Nin Bizys, Andrejus Henrikas Marcinkevicius |
| Pages | 7-12 |
| DOI | 10.4028/www.scientific.net/SSP.113.7 |
| Citation | R. Navickas, 2006, Solid State Phenomena, 113, 7 |
| Online since | June, 2006 |
| Authors | R. Navickas |
| Keywords | Micro-Electromechanical Systems (MEMS), Nanoelectromechanical Systems (NEMS), Nanotechnology, Self-Formation Processes, Top-Down Methods |
| Abstract | The analysis of technological trends nanoelectromechanical systems and processes of self-formation micro- and nanostructures in manufacturing MEMS/NEMS have been made and the requirements have been formulated. The results of modeling geometry nanostructures and the implementation of self-formation processes for creating new technologies of manufacturing MEMS/NEMS have also been presented. |
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