Paper Title:
Technological Trends of Nanoelectromechanical Systems
  Abstract

The analysis of technological trends nanoelectromechanical systems and processes of self-formation micro- and nanostructures in manufacturing MEMS/NEMS have been made and the requirements have been formulated. The results of modeling geometry nanostructures and the implementation of self-formation processes for creating new technologies of manufacturing MEMS/NEMS have also been presented.

  Info
Periodical
Solid State Phenomena (Volume 113)
Edited by
Nin Bizys, Andrejus Henrikas Marcinkevicius
Pages
7-12
DOI
10.4028/www.scientific.net/SSP.113.7
Citation
R. Navickas, "Technological Trends of Nanoelectromechanical Systems", Solid State Phenomena, Vol. 113, pp. 7-12, 2006
Online since
June 2006
Authors
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Price
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