Hybrid Experimental – Numerical Full-Field Displacement Evaluation for Characterization of Micro-Scale Components of Mechatronic Systems |
| Journal |
Solid State Phenomena (Volume 113) |
| Volume |
Mechatronic Systems and Materials |
| Edited by |
Nin Bizys, Andrejus Henrikas Marcinkevicius |
| Pages |
73-78 |
| DOI |
10.4028/www.scientific.net/SSP.113.73 |
| Online since |
June, 2006 |
| Authors |
Vytautas Ostaševičius,
Norm Gitis,
Arvydas Palevicius,
Minvydas Ragulskis,
Sigitas Tamulevičius
|
| Keywords |
Holography, Mechatronics, Micro-Electro-Mechanical Systems (MEMS), Visualization |
| Abstract |
Hybrid experimental – numerical techniques are applied to the problem of the
interpretation of patterns of fringes that are generated by non-contact full-field experimental
methods applied for analysis of dynamic displacement fields of MEMS components. It is shown
that even rather simple cantilever beam of a MEMS switch can exhibit complex dynamical response
due to the nonlinearities of interactions and the surrounding noise. In many instances the
interpretation of experimental results is possible only after numerical simulation of MEMS
components in virtual computational environments. |
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