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Hybrid Experimental – Numerical Full-Field Displacement Evaluation for Characterization of Micro-Scale Components of Mechatronic Systems

Journal Solid State Phenomena (Volume 113)
Volume Mechatronic Systems and Materials
Edited by Nin Bizys, Andrejus Henrikas Marcinkevicius
Pages 73-78
DOI 10.4028/www.scientific.net/SSP.113.73
Citation Vytautas Ostaševičius et al., 2006, Solid State Phenomena, 113, 73
Online since June, 2006
Authors Vytautas Ostaševičius, Norm Gitis, Arvydas Palevicius, Minvydas Ragulskis, Sigitas Tamulevičius
Keywords Holography, Mechatronics, Micro-Electromechanical Systems (MEMS), Visualization
Abstract

Hybrid experimental – numerical techniques are applied to the problem of the interpretation of patterns of fringes that are generated by non-contact full-field experimental methods applied for analysis of dynamic displacement fields of MEMS components. It is shown that even rather simple cantilever beam of a MEMS switch can exhibit complex dynamical response due to the nonlinearities of interactions and the surrounding noise. In many instances the interpretation of experimental results is possible only after numerical simulation of MEMS components in virtual computational environments.

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