Paper Title:
Buried Nano - Structured Layers in High Temperature – Pressure Treated Si:He
  Abstract

The effect of treatment at up to 1400 K (HT) under enhanced hydrostatic pressure (HP, up to 1.2 GPa) on helium implanted single crystalline silicon (Si:He, He ion dose up to 6x1017cm-2, energy up to 300 keV) has been investigated by transmission electron microscopy, secondary ion mass spectrometry, photoluminescence and X-Ray methods. The treatment of Si:He at ≤ 920 K - HP results in a formation of buried nano-structured layers containing helium filled cavities/bubbles and numerous extended defects; many less dislocations are created at ≥ 1270 K in Si:He treated under HP. HP affects the recrystallization of amorphous Si, diffusivity of implanted He and of implantation-induced defects and thus promotes the creation of more but smaller He-filled cavities/bubbles as well as other defects near the range of implanted He+.

  Info
Periodical
Solid State Phenomena (Volume 114)
Edited by
Witold Lojkowski and John R. Blizzard
Pages
285-290
DOI
10.4028/www.scientific.net/SSP.114.285
Citation
A. Misiuk, B. Surma, J. Bak-Misiuk, V. Raineri, "Buried Nano - Structured Layers in High Temperature – Pressure Treated Si:He", Solid State Phenomena, Vol. 114, pp. 285-290, 2006
Online since
July 2006
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Ming Xiang Pan, Wei Hua Wang, Yong Hu, De Qian Zhao, Yan Hui Zhao, Tatsuya Okada, W. Utsumi
53
Authors: Andrzej Misiuk, Adam Barcz, Jadwiga Bak-Misiuk, Alexander G. Ulyashin, Przemyslaw Romanowski
Abstract:Hydrogen gettering by implantation-disturbed buried layers in oxygen-implanted silicon (Si:O, prepared by O2+ implantation at energy 200 keV...
35
Authors: Kausala Mylvaganam, Liang Chi Zhang
Chapter 4: Fluid Mechanics and Thermodynamics
Abstract:Mono-crystalline silicon experiences various phase transformations under different loading conditions. This paper reveals, with the aid of...
666
Authors: Yun Dong, Xiao Ping Lin, Run Guo Zheng, Shi Hui Jiao
Chapter 7: Materials and Energy Saving
Abstract:The solidification microstructure of Mg-6Zn-3Y alloy under super-high pressure was investigated by using X-ray diffraction (XRD) and scanning...
1347
Authors: Nadezhda Dudova, Andrey Belyakov, Rustam Kaibyshev
Tuesday
Abstract:Microstructure evolution during annealing of a Ni-20%Cr alloy subjected to high-pressure torsion (HPT) at ambient temperature was examined....
309