In order to produce a high quality and cost effective part in the rheocasting process for an automobile industry it has been important to develop a slurry-on-demand process, which can manufacture the semi-solid slurry having a fine and globular structure of primary solid phase. The morphology of primary solid phase of semi-solid slurry is coarsened and globularized during an isothermal holding process in a solid-liquid region. Accordingly, in this paper, the microstructural evolution of semi-solid slurry during the isothermal holding at a various temperature in solid-liquid region was investigated to examine a coarsening and globularization behavior of primary solid phase. The semi-solid slurry of Al alloy was produced in a slurry maker using a multiplex-type slurry cup that we developed recently. A size of primary solid phase was the finer at the higher holding temperature, but under a constant holding time a roundness degree of primary solid phase was the lower at the lower holding temperature. Also, a coarsening rate of primary solid phase was not considered to be affected significantly by a holding temperature even though a little lower coarsening rate was obtained at the higher holding temperature.