This paper is concerned about the precision material property measurement of a micro metal thin foil used in MEMS technology. Evaluations of reliability such as the life cycle endurance test, impact test, and residual stress test are necessary for MEMS components, because MEMS components require great precision and accuracy. However, in practical reliability tests, we should consider various factors that make them hard to perform. In this manner, we use the analytical method to evaluate the reliability of MEMS component rather than actual testing. In general, the analytical method is utilized by software tools. Nevertheless, it is obviously necessary to acquire fundamental properties of materials through real test methods. In this paper, we proposed the micro scale material property measurement system to measure the oriented mechanical properties of aluminum thin foil.