Paper Title:
The Properties of Heavily Al-Doped ZnO Films by Simultaneous rc and dc Magnetron Sputtering
  Abstract

A radio frequency power (rf) was supplied to ZnO target, and a direct current (dc) power was supplied to Al target for the preparation of heavily Al-doped ZnO (ZnO:Al) films. The advantage of this kind of deposited method is that the Al content could be changed in a wide range. The ZnO:Al films prepared at different dc powers showed different surface morphologies, and corresponded to the different surface roughness. The ZnO:Al films prepared at high dc powers showed the amorphous structures, and resulted in very high resistivity. The resistivity of ZnO:Al film prepared at dc power of 40W was lower (8.52×10-3 -cm). It was mainly due to the relatively higher mobility, which probably resulted from the relatively low surface roughness, and corresponded to the surface morphology in the shape of cobblestone. In addition, the ZnO:Al films prepared at different dc powers showed different optical properties.

  Info
Periodical
Solid State Phenomena (Volume 118)
Edited by
Jang Hyun Sung, Chan Gyu Lee, Yong Zoo You, Young Kook Lee and Jae Young Kim
Pages
305-310
DOI
10.4028/www.scientific.net/SSP.118.305
Citation
S. S. Lin, J. L. Huang, "The Properties of Heavily Al-Doped ZnO Films by Simultaneous rc and dc Magnetron Sputtering", Solid State Phenomena, Vol. 118, pp. 305-310, 2006
Online since
December 2006
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Sang Moo Park, Takashi Tomemori, Tomoaki Ikegami, Kenji Ebihara
Abstract:High-quality transparent conductive Al-doped ZnO (AZO) thin films were deposited by pulsed laser deposition on quartz glass substrates at...
211
Authors: Wen Tsai Yen, Jia Hong Ke, Hsin Jung Wang, Yi Cheng Lin, Jung Lung Chiang
Abstract:This study investigates the effects of damp heat stability on the optoelectronic properties of ZnO:Al (AZO) and ZnO:Ga(GZO) films with...
923
Authors: Chien Chen Diao, Chao Chin Chan, Chia Ching Wu, Cheng Fu Yang
Abstract:“GfE Coating Materials Company” had developed a novel AZOY transparent conducting oxide (TCO) material that used ZnO as raw material and...
653
Authors: Yang Wang, Zhi Jian Peng, Qi Wang, Xiu Li Fu
Chapter 5: Emerging Inorganic Non-Metallic Materials
Abstract:ZnO1-x thin films were deposited by RF magnetron sputtering on conducting silicon wafers at room temperature with ZnOn...
723