Paper Title:
High Pressure on Asperity Surface Caused by Nano Particles’ Behavior in Non-Newtonian Slurries
  Abstract

Particle’s behavior in the slurry with power-law viscosity shows great effect on the wafer surface polishing. Hydrodynamic pressure is periodically generated on the surface asperity when particles are passing through it. Fatigue fracture occurs under the effect of periodical pressure and it begins from the top to the bottom of the asperity. Based on the energy-balance fracture theory, the removal rate is calculated and it shows good agreement with experiment data.

  Info
Periodical
Solid State Phenomena (Volumes 121-123)
Edited by
Chunli BAI, Sishen XIE, Xing ZHU
Pages
1143-1148
DOI
10.4028/www.scientific.net/SSP.121-123.1143
Citation
H.S. Chen, D. R. Chen, J. Li, "High Pressure on Asperity Surface Caused by Nano Particles’ Behavior in Non-Newtonian Slurries", Solid State Phenomena, Vols. 121-123, pp. 1143-1148, 2007
Online since
March 2007
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$32.00
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