Paper Title:
Nano-Structured Carbon Nitride Films for Microsensor Applications
  Abstract

Nano-structured carbon nitride film, which is a new sensor material, has been prepared by facing target magnetron sputter for microsensor applications. Surface morphology, surface roughness and bonding structures of the films were investigated by EDS, SEM, AFM and FTIR spectroscopy. The growth rate of film is about 2.2 um/hr, and grain size and RMS roughness are about 320 nm and 0.9 nm, respectively. The impedance of micro-humidity-sensor, which was fabricated by the conventional semiconductor fabrication process including lift-off technique, changed 95.4 kΩ to 2 kΩ in the relative humidity range of 5 % to 95 %.

  Info
Periodical
Solid State Phenomena (Volumes 121-123)
Edited by
Chunli BAI, Sishen XIE, Xing ZHU
Pages
1199-1202
DOI
10.4028/www.scientific.net/SSP.121-123.1199
Citation
J.G. Lee, S.P. Lee, "Nano-Structured Carbon Nitride Films for Microsensor Applications", Solid State Phenomena, Vols. 121-123, pp. 1199-1202, 2007
Online since
March 2007
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