Paper Title:
Performance Investigation of a Micropositioning Table
  Abstract

In order to compensate the force induced deformation of the precision grinding, a piezoelectrically driven micropositioning table is developed to actuate the workpiece for error compensation. To better understand the performance of the micropositioning table, the deformation patterns and stiffness distribution of the micropositioning table under normal grinding force are investigated by computational finite element analysis method. It is noted that the moving part of the micropositioning table can be considered as rigid body and the maximum static stiffness is located at the center of the top surface. The experimental tests are carried out to verify the analysis.

  Info
Periodical
Solid State Phenomena (Volumes 121-123)
Edited by
Chunli BAI, Sishen XIE, Xing ZHU
Pages
1285-1288
DOI
10.4028/www.scientific.net/SSP.121-123.1285
Citation
Y. L. Tian, D. W. Zhang, B. Yan, "Performance Investigation of a Micropositioning Table", Solid State Phenomena, Vols. 121-123, pp. 1285-1288, 2007
Online since
March 2007
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Price
$32.00
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