Paper Title:
Design Research of Nanopositioner Based on SPM and Its Simulation of FEM
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 121-123)
Edited by
Chunli BAI, Sishen XIE, Xing ZHU
Pages
1473-1478
DOI
10.4028/www.scientific.net/SSP.121-123.1473
Citation
Z.Y. Zhang, H. Q. Li, H.X. Zhou, "Design Research of Nanopositioner Based on SPM and Its Simulation of FEM", Solid State Phenomena, Vols. 121-123, pp. 1473-1478, 2007
Online since
March 2007
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