A Comb Driving Magnetometer Based on Tunnel Effect
| Periodical | Solid State Phenomena (Volumes 121 - 123) |
|---|---|
| Main Theme | Nanoscience and Technology |
| Edited by | Chunli BAI, Sishen XIE, Xing ZHU |
| Pages | 561-564 |
| DOI | 10.4028/www.scientific.net/SSP.121-123.561 |
| Citation | Xue Hua Tang et al., 2007, Solid State Phenomena, 121-123, 561 |
| Online since | March, 2007 |
| Authors | Xue Hua Tang, Zheng You, Yong Jun Yang, Hong Tao He |
| Keywords | Comb Driving, Magnetometer, Micro-Electromechanical System (MEMS), Tunnel Effect |
| Price | US$ 28,- |
In this paper, a comb-driving tunneling magnetometer based on the tunneling effect is introduced. The designation, manufacture and tests of this magnetometer are discussed, including its structure, FEA analysis, machining processes and test results. The test results indicate that the chip is coincidental with the tunneling effect and the chip is capable of sensing the magnetic signal.