Paper Title:

A Comb Driving Magnetometer Based on Tunnel Effect

Periodical Solid State Phenomena (Volumes 121 - 123)
Main Theme Nanoscience and Technology
Edited by Chunli BAI, Sishen XIE, Xing ZHU
Pages 561-564
DOI 10.4028/www.scientific.net/SSP.121-123.561
Citation Xue Hua Tang et al., 2007, Solid State Phenomena, 121-123, 561
Online since March, 2007
Authors Xue Hua Tang, Zheng You, Yong Jun Yang, Hong Tao He
Keywords Comb Driving, Magnetometer, Micro-Electromechanical System (MEMS), Tunnel Effect
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Abstract

In this paper, a comb-driving tunneling magnetometer based on the tunneling effect is introduced. The designation, manufacture and tests of this magnetometer are discussed, including its structure, FEA analysis, machining processes and test results. The test results indicate that the chip is coincidental with the tunneling effect and the chip is capable of sensing the magnetic signal.