Paper Title:
Nano-Displacement Sensing and Estimation (nDSE): Enabling Technology for Nano Metrology and Fabrication
  Abstract

In this paper, we will present theory for nDSE (nano-scale Displacement Sensing and Estimation) and its application framework: IDMA (Indirect Displacement-Measurement-based Alignment). nDSE presents a clear and novel theoretical explanation to displacement sensing and estimation, especially down to the nano scale, a precision traditionally thought difficult or impossible to achieve because the displacements are below the wavelength of light and smaller than the pixel dimensions of practical observation systems. IDMA is an enabling framework based on nDSE to provide a new, low-cost, high precision overlay alignment for the challenging issue of nano scale alignment and metrology.

  Info
Periodical
Solid State Phenomena (Volumes 121-123)
Edited by
Chunli BAI, Sishen XIE, Xing ZHU
Pages
817-822
DOI
10.4028/www.scientific.net/SSP.121-123.817
Citation
J. Gao, C. Picciotto, "Nano-Displacement Sensing and Estimation (nDSE): Enabling Technology for Nano Metrology and Fabrication", Solid State Phenomena, Vols. 121-123, pp. 817-822, 2007
Online since
March 2007
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Price
$32.00
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