Paper Title:
Carbon Nanotube Gas Sensor Fabricated on Anodic Aluminum Oxide
  Abstract

A new type of gas sensor was realized by directly depositing carbon nanotube on nano channels of the anodic alumina oxide (AAO) fabricated on p-type silicon substrate. The carbon nanotubes were synthesized by thermal chemical vapor deposition at a very high temperature of 1200 oC to improve the crystallinity. The device fabrication process was also developed. The contact of carbon nanotubes and p-type Si substrate showed a Schottky behavior, and the Schottky barrier height increased with exposure to gases while the overall conductivity decreased. The sensors showed fast response and recovery to ammonia gas upon the filling (400 mTorr) and evacuation.

  Info
Periodical
Solid State Phenomena (Volumes 124-126)
Edited by
Byung Tae Ahn, Hyeongtag Jeon, Bo Young Hur, Kibae Kim and Jong Wan Park
Pages
1309-1312
DOI
10.4028/www.scientific.net/SSP.124-126.1309
Citation
N. D. Hoa, N. V. Quy, G. S. Choi, Y. S. Cho, S. Y. Jeong, D. J. Kim, "Carbon Nanotube Gas Sensor Fabricated on Anodic Aluminum Oxide", Solid State Phenomena, Vols. 124-126, pp. 1309-1312, 2007
Online since
June 2007
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Price
$32.00
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