Iron Nanostructures Fabricated by Electron Beam Induced Deposition and its Magnetic Properties

Electron beam induced deposition (EBID) was carried out with gas introduction systems attached to field emission scanning electron microscope (FE-SEM). Using iron carbonyl and ferrocene, three dimensional (3-D) antenna structures were fabricated in the range of 30-50 nm in diameter and 500-1000 nm in size. Post-deposition annealing of iron nanostructures resulted in the formation of crystalline alpha-iron and iron carbide phases. The iron concentration was controlled by the partial pressure of iron carbonyl and ferrocene. Electron holography observation with field emission transmission electron microscopy (FE-TEM) revealed that the remanent magnetic flux density Br of the nanostructures also depends on the iron concentration.