Series of TiCrN wear resistant coatings have been known to be superior to other coatings in protecting tools which may be damaged corrosion, oxidization, abrasion and hardness of mold materials. The corrosion and oxidation resistance of TiN/CrN(TiCrN) multilayer coatings is better than that of single TiN and CrN coatings. TiCrN coated layer was formed by coating a layer of TixCr1-xN by non-stoichiometry. In this study, TiCrN coated layer by R.F magnetron sputtering was executed heat treatment each other temperature by tube furnace. And then surfaces of coated layer and cross sections were observed by FE-SEM and XRD. Corrosion resistance tester measured characterizations of coated layers. When the temperature increased, TiN was partially transformed to Ti2N and TiNX, and CrN was also transformed to Cr2N. The formation of non-stoichiometric phases decreased corrosion resistance.