Piezoelectric Bimorph Microphone with Low Stress Parylene Diaphragm |
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| Journal | Solid State Phenomena (Volumes 124 - 126) |
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| Volume | Advances in Nanomaterials and Processing |
| Edited by | Byung Tae Ahn, Hyeongtag Jeon, Bo Young Hur, Kibae Kim and Jong Wan Park |
| Pages | 161-164 |
| DOI | 10.4028/www.scientific.net/SSP.124-126.161 |
| Citation | Seung Hwan Yi et al., 2007, Solid State Phenomena, 124-126, 161 |
| Online since | June, 2007 |
| Authors | Seung Hwan Yi, Man Soon Yoon, Soon Chul Ur |
| Keywords | Bimorph Microphone, Parylene Diaphragm, Piezoelectric ZnO Film |
| Abstract | This paper describes a micromachined piezoelectric bimorph microphone, which is built on a low stress Parylene diaphragm with high quality ZnO films. The ZnO thin film has fine grain with the average grain size less than 1 and the grain orientation is perpendicular to the substrate. The highest sensitivity of piezoelectric bimorph microphone fabricated in this study is about 0.74 mV/Pa, which is twice higher than that of an individual segmented electrode. Based upon the experimental results, we proposed the equivalent electrical circuit model of piezoelectric bimorph microphone. |
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