Paper Title:
Characteristics of 2.45GHz Microwave Plasma by Langmuir Probe Measurements
  Abstract

The characteristics, such as electron temperature and the electron density, of CF4/Ar discharge in 2.45GHz microwave has been investigated by using a Langmuir probe with the microwave power and position. The results showed that the electron temperature and the electron density decrease with increasing distance from the plasma source. Increasing power enhances the dissociation and ionization of gas, and increases the electron densities. The electron temperature was decreased by reducing the mean free path of electrons with increasing microwave power. The electron temperature is 7.63 ~ 2.49 eV, and the electron density is 0.85×1011 ~ 4.3×1011 cm-3. From obtained electron energy distribution function, we known that high energy electron decreased with increasing microwave power and distance from the plasma source. The generated plasma by developed our system has good quality as results of Debye length λD = 35.8 ~ 67.3 μm, and Ln(ND) = 33.4 ~ 35.2.

  Info
Periodical
Solid State Phenomena (Volumes 124-126)
Edited by
Byung Tae Ahn, Hyeongtag Jeon, Bo Young Hur, Kibae Kim and Jong Wan Park
Pages
1621-1624
DOI
10.4028/www.scientific.net/SSP.124-126.1621
Citation
S. Y. Choi, W. Minami, L. H. Kim, H. J. Kim, "Characteristics of 2.45GHz Microwave Plasma by Langmuir Probe Measurements", Solid State Phenomena, Vols. 124-126, pp. 1621-1624, 2007
Online since
June 2007
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$32.00
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