Ceramic membranes having nano sized pores have great potential for gas separation at high temperature due to their good thermal stability. Moreover, nanoporous silicon carbide membrane has potential application under hydrothermal condition at high temperature. In this research, nanoporous SiC membrane has been developed on the porous alumina plate using preceramic polymers as CVD precursor at 850oC. The preceramic polymer was characterized with Si29 NMR, FT-IR, GC and TGA. The prepared SiC membrane was characterized with SEM and EDS. The hydrogen permeability and selectivity toward nitrogen gas were measured using a GC.