A Method for Interpreting V-I Probe in a Capacitively Coupled Plasma Discharge |
| Journal |
Solid State Phenomena (Volumes 124 - 126) |
| Volume |
Advances in Nanomaterials and Processing |
| Edited by |
Byung Tae Ahn, Hyeongtag Jeon, Bo Young Hur, Kibae Kim and Jong Wan Park |
| Pages |
327-330 |
| DOI |
10.4028/www.scientific.net/SSP.124-126.327 |
| Citation |
Su Jin Yoo et al., 2007, Solid State Phenomena, 124-126, 327 |
| Online since |
June, 2007 |
| Authors |
Su Jin Yoo, O Dae Kwon, Hee Hwan Choe, Jae Hong Jeon, Kang Woong Lee, Jong Hyun Seo, Dae Jin Seong, Jung Hyung Kim, Yong Hyeon Shin |
| Keywords |
Capacitively Coupled Plasma, Langmuir Probe, Phase Difference, Plasma Density, Rf Discharges, V-I Probe |
| Full Paper |
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