Paper Title:
A Method for Interpreting V-I Probe in a Capacitively Coupled Plasma Discharge
  Abstract

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Periodical
Solid State Phenomena (Volumes 124-126)
Edited by
Byung Tae Ahn, Hyeongtag Jeon, Bo Young Hur, Kibae Kim and Jong Wan Park
Pages
327-330
DOI
10.4028/www.scientific.net/SSP.124-126.327
Citation
S. J. Yoo, O. D. Kwon, H. H. Choe, J. H. Jeon, K. W. Lee, J. H. Seo, D. J. Seong, J. H. Kim, Y. H. Shin, "A Method for Interpreting V-I Probe in a Capacitively Coupled Plasma Discharge", Solid State Phenomena, Vols. 124-126, pp. 327-330, 2007
Online since
June 2007
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$32.00
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