Advances in Nanomaterials and Processing
Solid State Phenomena Volumes 124 - 126
doi:10.4028/www.scientific.net/SSP.124-126
-
p239
Structural and Mechanical Properties of Low Dielectric Constant SiOC(-H) Films Using MTES/O2 Deposited by PECVD
[
204 K
]
Authors: R. Navamathavan, Anvar Zakirov, Hyun Seung Kim, Yong Jun Jang, An Soo Jung, Chi Kyu Choi
-
p243
Effects of Firing Temperature and Film Thickness on the Critical Properties of YBCO Film by the '211 Process'
[
273 K
]
Authors: Jun Hyung Lim, Seok Hern Jang, Seung Yi Lee, Kyung Min Yoon, Kyu Tae Kim, Jin Ho Joo, Hoo Jeong Lee, Hee Gyoun Lee, Gye Won Hong
-
p247
Characteristics of SiO2 Film Grown by Atomic Layer Deposition as the Gate Insulator of Low-Temperature Polysilicon Thin-Film Transistors
[
223 K
]
Authors: Won Jun Lee, Min Ho Chun, Kwang Su Cheong, Kwang Chol Park, Chong Ook Park, Guo Zhong Cao, Sa Kyun Rha
-
p251
Electronic Properties Carbon Film Using Chemical Process
[
648 K
]
Authors: Sang Heon Lee
-
p255
Microstructural Study on the Wear Behavior of Cu-TiB2 Composites for Electrical Contact Materials
[
692 K
]
Authors: Tae Woo Lee, Chan Soo Shin, Kae Myung Kang
-
p259
Study on Light Induced Leakage Current Related to Amorphous Silicon TFT Design
[
175 K
]
Authors: Jae Hong Jeon, Kang Woong Lee
-
p263
Indium Tin Oxide Film Characteristics after Chemical Mechanical Polishing Process with Control of Pad Conditioning Temperature
[
555 K
]
Authors: Nam Hoon Kim, Gwon Woo Choi, Yong Jin Seo, Woo Sun Lee
-
p267
Electrical and Thermal Properties of Platinum Thin Films Prepared by DC Magnetron Sputtering for Micro-Heater of Microsensor Applications after CMP Process
[
260 K
]
Authors: Nam Hoon Kim, Dong Myong Na, Pil Ju Ko, Jin Seong Park, Woo Sun Lee
-
p271
Characteristics of Inductive Coupled Plasma with Internal Linear Antenna Using Multi-Polar Magnetic Field for FPD Processing
[
211 K
]
Authors: Jong Hyeuk Lim, Kyong Nam Kim, Geun Young Yeom
-
p275
Formation of High Flux Parallel Neutral Beam Using a Three Grid System of Ion Beam during Low Angle Forward Reflection of Ions
[
666 K
]
Authors: Byoung Jae Park, Kyoung Seok Min, Sang Duk Park, Jeong Woon Bae, Oleksiy Vozniy, Geun Young Yeom
-
p279
Nickel-Based Germanosilicide of Heavily-Doped SiGe Films for Low Resistance and High-Temperature Stability
[
324 K
]
Authors: A Ram Choi, Sang Sik Choi, Jung Hyun Kim, Sang Hoon Kim, Kyu Hwan Shim
-
p283
Effect of Substrate Texture on Superconducting Properties of YBCO Thick Films
[
382 K
]
Authors: Young Ha Kim, Tae Hyun Sung, Sang Chul Han, Young Hee Han, Nyeon Ho Jeong, Jae Won Shin, Kwang Soo No
-
p287
Study on the Synthesis and Characterization of PANi/Nano-CeO2 Composites
[
162 K
]
Authors: Fei Liu, Yong Jun He, Jeung Soo Huh
-
p291
The Effect of Bias Power on the Etching Rate and Uniformity of Silicon Dioxide for N-Slot Inductively Coupled Plasma in TFT Application
[
2 M
]
Authors: Che Hung Wei, Yu Hung Chen
-
p295
Surface Modification of Novel Organic-Inorganic Hybrid Dielectrics Using Self-Assembled Monolayers
[
391 K
]
Authors: Sun Ho Jeong, Dong Jo Kim, Sul Lee, Bong Kyun Park, Joo Ho Moon