Paper Title:
Temperature Dependence of Internal Stress and Crystal Growth of Dilute Cu Alloy Films
  Abstract

Annealing behavior of dilute Cu-X alloys (adding element X = transition metal and rare-earth metal with less than 3 at %) was investigated in terms of resistivity, internal stress, grain growth and hillock formation. The resistivity increases with addition of impurities regardless of kinds of adding elements. Generally, resistivity starts to decrease on annealing above 200 °C. Among present Cu dilute alloys, Sn addition shows the lowest resistivity 2.5 μΩcm on annealing at 400 °C. However, compared with a pure Cu film, salient grain growth of present dilute alloys does not takes place even at temperatures above 300 °C , where the grain size is nearly the same as that of as-deposited films. In-situ surface observation using an atomic force microscope (AFM ) revealed that hillocks did not grow on cooling stage (under tension), but started to form on heating stage (under compression). The scanning electron microscopy (SEM) observation of hillocks thus formed in present dilute alloy films shows that the external appearance of these defects was quite different from those observed in Al and Al alloy films. They most likely grow with a preferential crystal plane, not irregular growth like Al and Al alloy films. The internal stresses in most of the present as-deposited dilute Cu alloy films were nearly zero or compression of –25 to –100MPa, and upon annealing, they started to increase in tensile manner due to thermal stresses induced by the mismatch of the thermal expansion between substrates and deposited films. A large stress relaxation started to occur above 250°C, associating with a large number of hillock formation.

  Info
Periodical
Solid State Phenomena (Volume 127)
Edited by
Masaaki Naka
Pages
147-152
DOI
10.4028/www.scientific.net/SSP.127.147
Citation
Y. Koike, T. Inase, S. Takayama, "Temperature Dependence of Internal Stress and Crystal Growth of Dilute Cu Alloy Films", Solid State Phenomena, Vol. 127, pp. 147-152, 2007
Online since
September 2007
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Jeong Min Kim, Bong Koo Park, Joong Hwan Jun, Ki Tae Kim, Woon Jae Jung
Abstract:Small amounts of minor alloying elements such as RE and Sr were added to Mg- 8wt%Al-5wt%Zn (AZ91D+4%Zn), and their effects on the...
374
Authors: Xiao Ping Luo, Lan Ting Xia, Ming Gang Zhang
Abstract:The effect of Cd and Sb addition on the microstructural and mechanical properties of as-cast AZ31 alloys was investigated and compared. The...
197
Authors: Katarzyna Bałdys, Grzegorz Dercz, Łukasz Madej
Abstract:The ferromagnetic shape memory alloys (FSMA) are relatively the brand new smart materials group. The most interesting issue connected with...
171
Authors: Thangaraju Shanmugasundaram, Martin Heilmaier, V. Subramanya Sarma, B.S Murty
Chapter 5: Microstructure and Properties
Abstract:Bulk nanostructured Al-4Cu alloy was synthesized by high energy ball milling followed by vacuum hot pressing. Its thermal stability was...
234
Authors: Hsi Hsin Chien, Kung Jeng Ma, Chien Hung Kuo
Chapter 3: Mechanical Engineering and Manufacturing
Abstract:Glass molding process provides a great potential for the production of precise glass optical components at low cost. The platinum-iridium...
533