Paper Title:
Development of Large Area Plasma Reactor Using Multiple Low-Inductance Antenna Modules for Flat Panel Display Processing
  Abstract

This article reports characteristics of plasmas sustained with LIA modules and profile control capabilities. Experiments with a meter-scale reactor demonstrated uniform plasma production to attain densities as high as 5x1011 cm-3 at an argon pressure of 1.3 Pa and an RF power of 4 kW. Design issues for large-area plasma sources with a scale-size of 3 m were also presented to exhibit the feasibility of novel large-area plasma sources to meet the requirements of the next-generation meters-scale processing.

  Info
Periodical
Solid State Phenomena (Volume 127)
Edited by
Masaaki Naka
Pages
239-244
DOI
10.4028/www.scientific.net/SSP.127.239
Citation
Y. Setsuhara, K. Takenaka, A. Ebe, K. Nishisaka, "Development of Large Area Plasma Reactor Using Multiple Low-Inductance Antenna Modules for Flat Panel Display Processing", Solid State Phenomena, Vol. 127, pp. 239-244, 2007
Online since
September 2007
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Price
$32.00
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