Hard a-Si3N4/MeNx Nanocomposite Coatings with High Thermal Stability and High Oxidation Resistance |
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| Journal | Solid State Phenomena (Volume 127) |
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| Volume | Designing of Interfacial Structures in Advanced Materials and their Joints |
| Edited by | Masaaki Naka |
| Pages | 31-36 |
| DOI | 10.4028/www.scientific.net/SSP.127.31 |
| Citation | Jindřich Musil et al., 2007, Solid State Phenomena, 127, 31 |
| Online since | September, 2007 |
| Authors | Jindřich Musil, P. Zeman |
| Keywords | a-Si3N4/MeNx Composites, DC Reactive Magnetron Sputtering, Mechanical Properties, Microstructure, Oxidation Resistance, Structure, Surface Morphology, ϒ-Phase |
| Abstract | This article reports on a new class of amorphous a-Si3N4/MeNx nanocomposite coatings with a high (≥50 vol.%) content of Si3N4 phase; here Me=Zr, Ta, Mo and W. These nanocomposites exhibit high (>1000°C) thermal stability against crystallization and high (>1000 °C) oxidation resistance if the metal Me incorporated in the nanocomposite is correctly selected. It was found that the Zr-Si-N film deposited on Si(100) substrate exhibits no increase of the mass (m=0) in thermogravimetric measurements performed in flowing air up to 1300 °C, i.e. up to the temperature that is the thermal limit for Si substrate but not for nanocomposite. |
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