The Reflectometry Studies on SiC and SiN Thin Layers |
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| Journal | Solid State Phenomena (Volume 130) |
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| Volume | APPLIED CRYSTALLOGRAPHY XX |
| Edited by | Danuta Stróż & Małgorzata Karolus |
| Pages | 293-296 |
| DOI | 10.4028/www.scientific.net/SSP.130.293 |
| Citation | Małgorzata Karolus et al., 2007, Solid State Phenomena, 130, 293 |
| Online since | December, 2007 |
| Authors | Małgorzata Karolus, Bożena Bierska-Piech, Eugeniusz Łągiewka |
| Keywords | Density, Roughness, Thickness, X-Ray Reflectometry |
| Abstract | The X-ray reflectivity measurements were used for the analyses of the SiC and SiN thin layers. Density, roughness and the thickness were determined for searching materials. The calculations and simulations were carried out using the WinGixa software. The obtained results show that the studied layers are non-homogenous and there are consist of “sub-layers” rich in Si-C, Si-N, SI-O phases. Moreover, the presence of the main amorphous phase was observed in all searching samples. |
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