Paper Title:
Thickness Measurement of Thin Textured Films by a Novel X-Ray Diffraction Method Accounting for Secondary Extinction
  Abstract

Accounting for secondary extinction (SE) of the intensities measured from a textured film by means of conventional X-ray diffractometer, a new X-ray diffraction method is described for determination of film thickness. Physically, the problem is restricted to using a reflection pair corresponding to the main component of the texture. As model sample a vacuum-deposited silver thin film is used.

  Info
Periodical
Solid State Phenomena (Volume 130)
Edited by
Danuta Stróż & Małgorzata Karolus
Pages
43-46
DOI
10.4028/www.scientific.net/SSP.130.43
Citation
I. Tomov, S. Vassilev, "Thickness Measurement of Thin Textured Films by a Novel X-Ray Diffraction Method Accounting for Secondary Extinction", Solid State Phenomena, Vol. 130, pp. 43-46, 2007
Online since
December 2007
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