Thickness Measurement of Thin Textured Films by a Novel X-Ray Diffraction Method Accounting for Secondary Extinction |
|
| Journal | Solid State Phenomena (Volume 130) |
|---|---|
| Volume | APPLIED CRYSTALLOGRAPHY XX |
| Edited by | Danuta Stróż & Małgorzata Karolus |
| Pages | 43-46 |
| DOI | 10.4028/www.scientific.net/SSP.130.43 |
| Citation | I. Tomov et al., 2007, Solid State Phenomena, 130, 43 |
| Online since | December, 2007 |
| Authors | I. Tomov, S. Vassilev |
| Keywords | Extinction, Film, Measurement, Texture, Thickness, X-Ray Diffraction (XRD) |
| Abstract | Accounting for secondary extinction (SE) of the intensities measured from a textured film by means of conventional X-ray diffractometer, a new X-ray diffraction method is described for determination of film thickness. Physically, the problem is restricted to using a reflection pair corresponding to the main component of the texture. As model sample a vacuum-deposited silver thin film is used. |
| Full Paper | 
Get the full paper by clicking here
|
First page example
