Paper Title:

Divacancy Induced Improvement for Stabilization of Silicon Conductivity versus Temperature

Periodical Solid State Phenomena (Volumes 131 - 133)
Main Theme Gettering and Defect Engineering in Semiconductor Technology XII
Edited by A. Cavallini, H. Richter, M. Kittler and S. Pizzini
Pages 21-26
DOI 10.4028/www.scientific.net/SSP.131-133.21
Citation G.N. Kamaev et al., 2007, Solid State Phenomena, 131-133, 21
Online since October, 2007
Authors G.N. Kamaev, M.D. Efremov, V.A. Stuchinsky, B.I. Mihailov, S.G. Kurkin
Keywords Divacancy, Electron Irradiation, FZ Silicon, Multi-Electron Center, Power Electronics
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Abstract

In present work temperature stable conductivity is considered for neutron-doped FZ silicon with point radiation defects. It was shown that divacancy formed after electron irradiation allow to increase resistivity of silicon at room temperature, what lead to less variation of conductivity in a range of temperatures 20-160C. Discrepancy between experimental and theoretical data was evaluated and corrected with introduction in the model deep level center Ec-0.6eV. As result of investigation power resistors were elaborated with 10% deviation from nominal value within the range of temperatures.