Paper Title:
Integrated Approach for Modeling of Heat Transfer and Microdefect Formation during CZ Silicon Single Crystal Growth
  Abstract

The features of microdefect formation during dislocation-free Si single crystals are considered in connection with the specific thermal CZ growing conditions. For this purpose the thermal crystal growth histories are calculated by means of a global thermal mathematical model and then on their basis the intrinsic point defect recombination and microdefect formation are modeled numerically. Difficulty of such integrated approach is explained by of the complicated and conjugated thermal modeling and a presence of various temperature zones in growing single crystal, answering to various defect formation mechanisms.

  Info
Periodical
Solid State Phenomena (Volumes 131-133)
Edited by
A. Cavallini, H. Richter, M. Kittler and S. Pizzini
Pages
283-288
DOI
10.4028/www.scientific.net/SSP.131-133.283
Citation
A.I. Prostomolotov, N.A. Verezub, "Integrated Approach for Modeling of Heat Transfer and Microdefect Formation during CZ Silicon Single Crystal Growth", Solid State Phenomena, Vols. 131-133, pp. 283-288, 2008
Online since
October 2007
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Elena D. Tabachnikova, Aleksey V. Podolskiy, Vladimir Z. Bengus, S.N. Smirnov, V.D. Natsik, V.M. Azhazha, M.A. Tikhonovsky, A.N. Velikodny, N.F. Andrievskaya, G.E. Storozhilov, T.M. Tikhonovskaya
Abstract:Plasticity of ultra-fine grained (UFG) zirconium (grain size ~ 0.4 µm), produced by intensive plastic deformation (IPD) - a combination of...
452
Authors: A.I. Prostomolotov, N.A. Verezub, M.G. Milvidskii
Abstract:In an application to large diameter Czochralski (CZ) silicon (Si) single crystal growing the influence on crystal temperature field of...
217
Authors: Kee Rong Wu, Chung Hsuang Hung, Hao Cheng Chang, Jui Ching Sun
Abstract:Visible-light enabled titanium oxide (TiO2) films deposited on indium tin oxide (ITO) substrates are investigated for their capabilities to...
79
Authors: Jia Ying Teng, Xian Guo Wu, Ge Qian Zhou, Wei Jia Zhao, Jing Cao
Chapter 4: Advanced Design Technology
Abstract:In the last few years, in order to solve the problems of traditional delivery mode in construction industry, such as over budget, project...
370
Authors: J. Kaupužs, Arturs Medvid'
Chapter 1: Solid-State Physics and Related Technologies
Abstract:The photo current-voltage characteristic of a solar cell with graded band gap is calculated numerically based on the drift-diffusion equation...
114