Paper Title:
Evolution of Thermal Donors in Silicon Enhanced by Self-Interstitials
  Abstract

The time dependence of thermal donor (TD) concentration, N(t), during annealing at 450oC was measured in samples cut from a single slab of silicon containing bands of grown-in microdefects of different types. An enormous impact of the microdefect type on the kinetic curve was observed. Samples from the interstitial region showed simple linear rise in N(t). The samples from an inner part of the vacancy region showed a complicated oscillating variation with an abrupt disappearance of the TDs at some moment followed by an immediate restoration of a linear rise. In samples from the marginal H-band of the vacancy region, an initial anneal does not produce TDs. However if this anneal was followed by a quench, subsequent anneals produce a linear rise in N(t). On the other hand, if the sample was slowly cooled, the subsequent production of TDs remained almost negligible. These observed peculiarities are accounted for by enhanced TD growth in the presence of self-interstitials (I) - due to IO species serving as vehicles for oxygen transport.

  Info
Periodical
Solid State Phenomena (Volumes 131-133)
Edited by
A. Cavallini, H. Richter, M. Kittler and S. Pizzini
Pages
387-392
DOI
10.4028/www.scientific.net/SSP.131-133.387
Citation
V. V. Voronkov, G.I. Voronkova, A.V. Batunina, R. J. Falster, V.N. Golovina, A.S. Guliaeva, N.B. Tiurina , M.G. Milvidski, "Evolution of Thermal Donors in Silicon Enhanced by Self-Interstitials", Solid State Phenomena, Vols. 131-133, pp. 387-392, 2008
Online since
October 2007
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$32.00
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