Hydrogenated Nanocrystalline Silicon Thin Films Studied by Scanning Force Microscopy. |
| Journal |
Solid State Phenomena (Volumes 131 - 133) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology XII |
| Pages |
547-552 |
| DOI |
10.4028/www.scientific.net/SSP.131-133.547 |
| Online since |
October, 2007 |
| Authors |
Daniela Cavalcoli,
Marco Rossi,
Andrea Tomasi,
Anna Cavallini,
Danny Chrastina,
Giovanni Isella
|
| Keywords |
Atomic Force Microscopy, Nanocrystalline Silicon, Solar Cell |
| Abstract |
Hydrogenated nanocrystalline silicon for photovoltaic applications has been investigated.
Morphological properties, as well as electrical properties, have been investigated with high spatial
resolution by scanning force microscopy analyses (AFM, Atomic Force Microscopy and C-AFM
conductive AFM). A major problem regarding the electronic properties is to understand where the
current flows. The present contribution aims to clarify which of the material phases mainly
contributes to the conduction mechanism. |
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