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Hydrogenated Nanocrystalline Silicon Thin Films Studied by Scanning Force Microscopy.

Journal Solid State Phenomena (Volumes 131 - 133)
Volume Gettering and Defect Engineering in Semiconductor Technology XII
Edited by A. Cavallini, H. Richter, M. Kittler and S. Pizzini
Pages 547-552
DOI 10.4028/www.scientific.net/SSP.131-133.547
Citation Daniela Cavalcoli et al., 2007, Solid State Phenomena, 131-133, 547
Online since October, 2007
Authors Daniela Cavalcoli, Marco Rossi, Andrea Tomasi, Anna Cavallini, Danny Chrastina, Giovanni Isella
Keywords Atomic Force Microscope (AFM), Nanocrystalline Silicon, Solar Cell
Abstract

Hydrogenated nanocrystalline silicon for photovoltaic applications has been investigated. Morphological properties, as well as electrical properties, have been investigated with high spatial resolution by scanning force microscopy analyses (AFM, Atomic Force Microscopy and C-AFM conductive AFM). A major problem regarding the electronic properties is to understand where the current flows. The present contribution aims to clarify which of the material phases mainly contributes to the conduction mechanism.

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