Regular Dislocation Networks in Silicon. Part I: Structure |
| Journal |
Solid State Phenomena (Volumes 131 - 133) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology XII |
| Edited by |
A. Cavallini, H. Richter, M. Kittler and S. Pizzini |
| Pages |
571-578 |
| DOI |
10.4028/www.scientific.net/SSP.131-133.571 |
| Citation |
T. Wilhelm et al., 2007, Solid State Phenomena, 131-133, 571 |
| Online since |
October, 2007 |
| Authors |
T. Wilhelm, Teimuraz Mchedlidze, X. Yu, Tzanimir Arguirov, Martin Kittler, Manfred Reiche |
| Keywords |
Dislocation Network, Dislocations, Wafer Bonding |
| Full Paper |
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