Paper Title:
All-Wet Stripping of FEOL Photoresist Using Mixtures of Sulphuric Acid
  Abstract

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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
105-108
DOI
10.4028/www.scientific.net/SSP.134.105
Citation
E. Bellandi, M. Alessandri, S. Detterbeck, S. A. Henry, L. Archer, T. Hellweg, M. Kagerer, L. Brilz, "All-Wet Stripping of FEOL Photoresist Using Mixtures of Sulphuric Acid", Solid State Phenomena, Vol. 134, pp. 105-108, 2008
Online since
November 2007
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