All Wet Stripping of Implanted Photoresist |
| Journal |
Solid State Phenomena (Volume 134) |
| Volume |
Ultra Clean Processing of Semiconductor Surfaces VIII |
| Edited by |
Paul Mertens, Marc Meuris and Marc Heyns |
| Pages |
109-112 |
| DOI |
10.4028/www.scientific.net/SSP.134.109 |
| Citation |
Kurt K. Christenson et al., 2007, Solid State Phenomena, 134, 109 |
| Online since |
November, 2007 |
| Authors |
Kurt K. Christenson, Jeffery W. Butterbaugh, Thomas J. Wagener, Nam Pyo Lee, Brent Schwab, Michael Fussy, John Diedrick |
| Keywords |
Implanted Photoresist Stripping, Piranha, Wet Strip |
| Full Paper |
Get the full paper by clicking here
|
