Paper Title:
Single Wafer Hydrophobic Surface Preparation on 300mm by HF Vapor
  Abstract

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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
11-14
DOI
10.4028/www.scientific.net/SSP.134.11
Citation
T. Salvetat, O. Pollet, P. Besson, N. Rochat, "Single Wafer Hydrophobic Surface Preparation on 300mm by HF Vapor", Solid State Phenomena, Vol. 134, pp. 11-14, 2008
Online since
November 2007
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