Single Wafer Hydrophobic Surface Preparation on 300mm by HF Vapor |
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| Journal | Solid State Phenomena (Volume 134) |
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| Volume | Ultra Clean Processing of Semiconductor Surfaces VIII |
| Edited by | Paul Mertens, Marc Meuris and Marc Heyns |
| Pages | 11-14 |
| DOI | 10.4028/www.scientific.net/SSP.134.11 |
| Online since | November, 2007 |
| Authors | Thierry Salvetat, Olivier Pollet, Pascal Besson, Névine Rochat |
| Keywords | 300mm Wafer, HF Last, HF Vapor, Hydrophobic Surface, Surface Preparation |
| Full Paper | 
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