Paper Title:
Study of a Metal Gate and Silicon Selective “Dry Ash Only” Process for Combined Extension and Halo Implanted Photo Resist
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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
113-116
DOI
10.4028/www.scientific.net/SSP.134.113
Citation
G. Mannaert, M. R. Baklanov, D. Goossens, J. Vertommen, W. Boullart, "Study of a Metal Gate and Silicon Selective “Dry Ash Only” Process for Combined Extension and Halo Implanted Photo Resist", Solid State Phenomena, Vol. 134, pp. 113-116, 2008
Online since
November 2007
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