Paper Title:
High Dose Implant Stripping and Residue Removal with Sequential Plasma and Vacuum Aerosol Processes
  Abstract

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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
117-120
DOI
10.4028/www.scientific.net/SSP.134.117
Citation
K. A. Reinhardt, K. Makhamreh, G. Tannous, "High Dose Implant Stripping and Residue Removal with Sequential Plasma and Vacuum Aerosol Processes", Solid State Phenomena, Vol. 134, pp. 117-120, 2008
Online since
November 2007
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$32.00
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