Paper Title:
Confined Chemical Cleaning: A Novel Concept Evaluated for Front End of Line Applications
  Abstract

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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
121-124
DOI
10.4028/www.scientific.net/SSP.134.121
Citation
I. Vos, S. Peeters, R. Verbeeck, W. Boullart, J. Vertommen, "Confined Chemical Cleaning: A Novel Concept Evaluated for Front End of Line Applications", Solid State Phenomena, Vol. 134, pp. 121-124, 2008
Online since
November 2007
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