Paper Title:
II: Ultra-Shallow Junction Cleaning: Methodologies for Process and Chemistry Optimization
  Abstract

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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
133-137
DOI
10.4028/www.scientific.net/SSP.134.133
Citation
A. K. Srivastava, K. P. Han, M. S. Ameen, I. L. Berry, S. Rounds, "II: Ultra-Shallow Junction Cleaning: Methodologies for Process and Chemistry Optimization ", Solid State Phenomena, Vol. 134, pp. 133-137, 2008
Online since
November 2007
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