Paper Title:
Effect of Dopants on the Dissolution Behavior of Silicon Substrates in HF-Based Cleaning Solutions
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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
139-142
DOI
10.4028/www.scientific.net/SSP.134.139
Citation
S. Abu Jeriban, I. Guiot, L. Bacherius, J. Proost, E. Sleeckx, R. Vos, P. W. Mertens, "Effect of Dopants on the Dissolution Behavior of Silicon Substrates in HF-Based Cleaning Solutions ", Solid State Phenomena, Vol. 134, pp. 139-142, 2008
Online since
November 2007
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