Paper Title:
The Effect of Various Process Induced Damages on Wet Etching Rate Difference
  Abstract

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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
143-147
DOI
10.4028/www.scientific.net/SSP.134.143
Citation
H. G. Yoon, S. H. Lee, W. J. Kim, G. M. Choi, Y. W. Song, "The Effect of Various Process Induced Damages on Wet Etching Rate Difference ", Solid State Phenomena, Vol. 134, pp. 143-147, 2008
Online since
November 2007
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