Paper Title:

Insights into HF-Last Processes and Particle Performance in a Single Wafer Spin Cleaning Tool

Periodical Solid State Phenomena (Volume 134)
Main Theme Ultra Clean Processing of Semiconductor Surfaces VIII
Edited by Paul Mertens, Marc Meuris and Marc Heyns
Pages 15-18
DOI 10.4028/www.scientific.net/SSP.134.15
Citation Gim Chen et al., 2007, Solid State Phenomena, 134, 15
Online since November 2007
Authors Gim Chen, Ismail Kashkoush
Keywords Bare Silicon Wafer, HF Last, Particle Contamination, Single Wafer Processing
Price US$ 28,-
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