Insights into HF-Last Processes and Particle Performance in a Single Wafer Spin Cleaning Tool |
| Journal |
Solid State Phenomena (Volume 134) |
| Volume |
Ultra Clean Processing of Semiconductor Surfaces VIII |
| Edited by |
Paul Mertens, Marc Meuris and Marc Heyns |
| Pages |
15-18 |
| DOI |
10.4028/www.scientific.net/SSP.134.15 |
| Citation |
Gim Chen et al., 2007, Solid State Phenomena, 134, 15 |
| Online since |
November, 2007 |
| Authors |
Gim Chen, Ismail Kashkoush |
| Keywords |
Bare Silicon Wafer, HF Last, Particle Contamination, Single Wafer Processing |
| Full Paper |
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