Paper Title:
Insights into HF-Last Processes and Particle Performance in a Single Wafer Spin Cleaning Tool
  Abstract

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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
15-18
DOI
10.4028/www.scientific.net/SSP.134.15
Citation
G. Chen, I. Kashkoush, "Insights into HF-Last Processes and Particle Performance in a Single Wafer Spin Cleaning Tool", Solid State Phenomena, Vol. 134, pp. 15-18, Nov. 2007
Online since
November 2007
Price
US$ 28,-
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