Paper Title:
Interaction Forces between Oxide and Silica-Modified Terpolymer Abrasive and their Impact on CMP and Post-CMP
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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
169-172
DOI
10.4028/www.scientific.net/SSP.134.169
Citation
S. Armini, R. Burtovyy, I. Luzinov, C. M. Whelan, K. Maex, M. Moinpour, "Interaction Forces between Oxide and Silica-Modified Terpolymer Abrasive and their Impact on CMP and Post-CMP", Solid State Phenomena, Vol. 134, pp. 169-172, 2008
Online since
November 2007
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