Particle Deposition and Removal from Ge Wafers |
| Journal |
Solid State Phenomena (Volume 134) |
| Volume |
Ultra Clean Processing of Semiconductor Surfaces VIII |
| Edited by |
Paul Mertens, Marc Meuris and Marc Heyns |
| Pages |
173-176 |
| DOI |
10.4028/www.scientific.net/SSP.134.173 |
| Citation |
Sonja Sioncke et al., 2007, Solid State Phenomena, 134, 173 |
| Online since |
November, 2007 |
| Authors |
Sonja Sioncke, Marcel Lux, Wim Fyen, Marc Meuris, Paul W. Mertens, Antoon Theuwis |
| Keywords |
Cleaning, Etching, Germanium, Particle Deposition, Particle Removal |
| Full Paper |
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