Paper Title:
Particle Deposition and Removal from Ge Wafers
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
173-176
DOI
10.4028/www.scientific.net/SSP.134.173
Citation
S. Sioncke, M. Lux, W. Fyen, M. Meuris, P. W. Mertens, A. Theuwis, "Particle Deposition and Removal from Ge Wafers", Solid State Phenomena, Vol. 134, pp. 173-176, 2008
Online since
November 2007
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