Paper Title:
A Study of a Single-Wafer Process in Metal Contact Hole Cleaning
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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
177-180
DOI
10.4028/www.scientific.net/SSP.134.177
Citation
J. Y. Park, J. K. Song, H. M. Kim, H. K. Cho, T. G. Kim, B. H. Moon, E. S. Rho, L. Archer, W. H. Cho, "A Study of a Single-Wafer Process in Metal Contact Hole Cleaning", Solid State Phenomena, Vol. 134, pp. 177-180, 2008
Online since
November 2007
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