Paper Title:
The Active Role of Etch Products in Particle Removal by SC-1 Solutions
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
181-184
DOI
10.4028/www.scientific.net/SSP.134.181
Citation
A. Pfeuffer, W. Bensch, A. Lechner, H. Okorn-Schmidt, "The Active Role of Etch Products in Particle Removal by SC-1 Solutions ", Solid State Phenomena, Vol. 134, pp. 181-184, 2008
Online since
November 2007
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Price
$32.00
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