Paper Title:
Ex Situ Bubble Generation, Enhancing the Particle Removal Rate for Single Wafer Megasonic Cleaning Processes
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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
201-204
DOI
10.4028/www.scientific.net/SSP.134.201
Citation
F. Holsteyns, T. Janssens, S. Arnauts, W. Van der Putte, V. Minsier, J. Brunner, J. Straka, P. W. Mertens, "Ex Situ Bubble Generation, Enhancing the Particle Removal Rate for Single Wafer Megasonic Cleaning Processes", Solid State Phenomena, Vol. 134, pp. 201-204, 2008
Online since
November 2007
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