Paper Title:
New Brush Scrubbing Techniques for a Wafer Bevel, Apex and Edge
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
205-208
DOI
10.4028/www.scientific.net/SSP.134.205
Citation
H. Ugajin, H. Iwamoto, E. Hide, N. Hiraoka, T. Okumura, "New Brush Scrubbing Techniques for a Wafer Bevel, Apex and Edge", Solid State Phenomena, Vol. 134, pp. 205-208, 2008
Online since
November 2007
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